Beyond Best-Fit, Spatial Compensation of Metrology Data

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Publication Details

Published Date:
Authors: Edward West, Christopher Jamieson, Garrett Kelley
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Abstract

Current digital compensation techniques for uncontrolled boundary conditions such as profile at station lines and profile-per-unit-length (PPUL) fall short of accurately characterizing deformed flexible structures. Janicki Industries has developed Spatial Compensation (SC) to overcome these limitations and generate reportable metrology data with realistic force constraints to compensate for these inaccuracies.